Diamond or diamond like carbon coated chemical sensors and a met

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

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Details

310328, G01N 2918, H01L 4108

Patent

active

058805524

ABSTRACT:
A water vapor insensitive and corrosion resistant chemical or biochemical nsor device, including a transducer, coated with a protective coating of diamond or a diamond-like carbon, preferably by a pulsed laser deposition technique. The surface of the protective coating is coated with a chemoselective or bioselective absorption material or film.

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