Diamond-on-a-substrate for electronic applications

Stock material or miscellaneous articles – Self-sustaining carbon mass or layer with impregnant or...

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428332, 428457, 428698, B32B 700

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active

051262061

ABSTRACT:
A coated substrate product is disclosed which comprises a substrate and a polycrystalline diamond layer having a smooth surface finish, enhanced crystal orientation in comparison to industrial grade diamond powder particularly in the (220) and (400) directions, and excellent electrical and thermal properties. Also disclosed is a method for fabricating such a coated substrate in which the polycrystalline diamond layer is chemically vapor deposited onto the substrate at substrate temperatures in the range of 650.degree. to 825.degree. C.

REFERENCES:
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patent: 4725345 (1988-02-01), Sakamoto et al.
patent: 4731296 (1988-03-01), Kikuchi et al.
patent: 4783368 (1988-11-01), Yamamoto et al.
patent: 4873115 (1989-10-01), Matsumura et al.
patent: 4900628 (1990-02-01), Ikegaya et al.
English Translation of JP 63-307196 (published Dec. 14, 1988).
Matsumoto et al., "Vapor Deposition of Diamond Particles from Methane", Jap. Jour. of Appl. Pys., vol. 21, No. 4, Apr. 1982, pp. L183-L185.
Singh et al., "Growth of Polycrystalline Diamond Particles & Films by Hot-Filament CVD", J. Vac. Sci. Tech., 1988.
Kobashi et al., "Synthesis of Diamond by Use of Microwave Plasma Chemical Vapor Deposition: Morphology and Growth of Diamond Films", pp. 4067-4084 & Physical Review Bulletin of the American Physical Society, vol. 38(6), 1988.
Matsumoto et al., "Chemical Vapor Deposition of Diamond from Methane-Hydrogen Gas": Proc. 7th ICVM; Tokyo, Japan, pp. 386-391, (1982).

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