Diamond-like film and process for producing same

Details Diamond-like film and process for producing same Diamond-like film and process for producing same

1983-11-03

1985-03-12

Dixon, Jr., William R.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

423445, 423446, 423458, 204173, 428408, 427122, 427249, B05D 306

Patent

active

045045194

ABSTRACT:
An amorphous, carbonaceous, diamond-like film and a process for producing the same is disclosed. The film has an extremely low hydrogen content and an extremely low stress, is resistant to both acids and alkalis, and adheres tenaciously to many types of substrates including glasses, plastics, metals, and semiconductors. The process for producing this film is a hybrid process using radio frequency plasma decomposition of an alkane and a pair of spaced carbon electrodes.

REFERENCES:
patent: 3961103 (1976-06-01), Aisenberg
patent: 4060660 (1977-11-01), Carlson et al.
Berg et al., Thin Solid Films, vol. 58, pp. 117-120 (1979).
Holland et al., Thin Solid Films, vol. 58, pp. 107-116 (1979).
Ojha et al., Thin Solid Films, vol. 58, pp. 213-225 (1979).
Aisenberg et al., J. Applied Physics, vol. 42, No. 7, pp. 2953-2958, June 1971.

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