Diamond like carbon silicon on insulator substrates and...

Details Diamond like carbon silicon on insulator substrates and... Diamond like carbon silicon on insulator substrates and...

2006-12-12

2006-12-12

Baumeister, B. William (Department: 2891)

Semiconductor device manufacturing: process

Having diamond semiconductor component

C438S758000, C438S488000

Reexamination Certificate

active

07148079

ABSTRACT:
Diamond like carbon silicon on insulator substrates and methods of fabrication thereof are disclosed. In one form, a process for creating a composite structure for fabricating an electronic device is disclosed. The process includes forming a first diamond-like carbon layer on a substrate and coupling a support layer to the diamond-like carbon layer. The substrate is reduced to provide a device layer for fabricating a microelectronic device.

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