Etching a substrate: processes – Forming or treating article containing magnetically...
Patent
1995-12-13
1997-08-19
Powell, William
Etching a substrate: processes
Forming or treating article containing magnetically...
216 47, 216 51, B44C 122, C23F 100
Patent
active
056584709
ABSTRACT:
A diamond-like carbon mask is formed on the surface of the magnetic material for ion-milling the magnetic material into a magnetic pole of a transducer. The mask is formed by depositing a layer of diamond-like carbon over the magnetic material. Successive layers of photoresist, SiO.sub.2 and photoresist are applied over the magnetic material. The second layer of photoresist is patterned in the shape of the pole being formed. The exposed insulating layer is etched with an etchant that does not attack the diamond-like carbon, the exposed portions of the photoresist are exposed and removed, and the exposed portion of the diamond-like carbon is etched with an oxygen etchant. The remaining photoresist is washed away to remove the remaining insulating material. In one form of the invention, a layer of SiO.sub.2 may additionally be formed over the diamond-like carbon to protect the diamond-like carbon from being affected by any undercut of the photoresist by the oxygen etchant. The SiO.sub.2 layer is etched prior to etching the diamond-like carbon. The mask is used to ion mill the magnetic material to the desired pole.
REFERENCES:
patent: 4052749 (1977-10-01), Nomura et al.
patent: 5087608 (1992-02-01), Chan et al.
patent: 5271802 (1993-12-01), Chang et al.
patent: 5363265 (1994-11-01), Hsie et al.
patent: 5378316 (1995-01-01), Franke et al.
Patent Abstracts of Japan, vol. 9, No. 79 (P-347) (1802) 9 Apr. 1985 & JP,A,59 210 520 (Yukio Ichinose) 29 Nov. 1984.
Patent Abstracts of Japan, vol. 11, No. 211 (P-594) 9 Jul. 1987 & JP,A,62 033 317 (Matsushita Electric Ind Co Ltd) 13 Feb. 1987.
Patent Abstracts of Japan, vol. 16, No. 430 (P-1417) 9 Sep. 1992 & JP,A,04 147 411 (Mitsubishi Electric Corp) 20 May 1992.
Patent Abstracts of Japan, vol. 13, No. 167 (P-861) 20 Apr. 1989 & JP,A,01 004 913 (NEC Kansai Ltd) 10 Jan. 1989.
Patent Abstracts of Japan, vol. 11, No. 91 (P-558) (2538) 23 Mar. 1987 & JP,A,61 242 313 (Hitachi Ltd) 28 Oct. 1986.
Patent Abstracts of Japan, vol. 11, No. 49 (P-547) 14 Feb. 1987 & JP,A,61 216 109 (Matsushita Electric Ind Co Ltd) 25 Sep. 1986.
IBM Technical Disclosure Bulletin, vol. 31, No. 12, May 1989, Armonk, N.Y., US, pp. 317-318. "Low Stress Dielectric Coatings for Copper Parts".
IBM Technical Disclosure Bulletin, vol. 34, No. 2, Jul. 1991, Armonk, N.Y., US, pp. 19-20, "Thermal Ink Jet Heater Devices Incorporating Diamond-Like Carbon Films As Protective Overcoats".
Nunne William H.
Ruscello L. Vincent
Schultz Allan E.
Powell William
Seagate Technology Inc.
LandOfFree
Diamond-like carbon for ion milling magnetic material does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Diamond-like carbon for ion milling magnetic material, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Diamond-like carbon for ion milling magnetic material will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1102195