Diamond-like carbon films and process for production thereof

Details Diamond-like carbon films and process for production thereof Diamond-like carbon films and process for production thereof

1986-03-20

1987-03-03

Pianalto, Bernard D.

Stock material or miscellaneous articles

Composite

Of inorganic material

427 39, B32B 900

Patent

active

046475125

ABSTRACT:
Improved diamond-like carbon films of improved properties are deposited on various substrates utilizing a plasma assisted chemical vapor transport process (PACVT) process in which hydrogen is employed as the reactive process feedgas and in which the deposition process is conducted in a controllably energetic ion bombardment of the surface on which the films are grown by introducing the hydrogen feedgas into the reactor volume through a porous graphite electrode into a defined plasma geometry.

Affiliated with

Also associated with

Rating

Diamond-like carbon films and process for production thereof does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Diamond-like carbon films and process for production thereof, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Diamond-like carbon films and process for production thereof will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1016364