Diamond-like carbon encapsulation of magnetic heads

Coating processes – Coating by vapor – gas – or smoke – Carbon or carbide coating

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427122, 427402, 216 41, C23C 1626, G11B 5127

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active

057189498

ABSTRACT:
A thin film magnetic transducer supported on a substrate includes a coil that terminates at pads supported on the substrate. A layer of diamond-like carbon material encapsulates the head, substrate and coil, but not the pads. A thin layer of diamond-like carbon is deposited over the exposed portions of the transducer, coil and substrate. Three techniques are described for exposing the pads including employing a photoresist mask, depositing an adhesive layer of silicon over the conductive paths but not the pads, and using a photoresist mask to etch the diamond-like carbon layer over the pads and breaking down the silicon adhesive layer with a design voltage.

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