Coating processes – Coating by vapor – gas – or smoke – Carbon or carbide coating
Patent
1996-09-27
1998-02-17
King, Roy V.
Coating processes
Coating by vapor, gas, or smoke
Carbon or carbide coating
427122, 427402, 216 41, C23C 1626, G11B 5127
Patent
active
057189498
ABSTRACT:
A thin film magnetic transducer supported on a substrate includes a coil that terminates at pads supported on the substrate. A layer of diamond-like carbon material encapsulates the head, substrate and coil, but not the pads. A thin layer of diamond-like carbon is deposited over the exposed portions of the transducer, coil and substrate. Three techniques are described for exposing the pads including employing a photoresist mask, depositing an adhesive layer of silicon over the conductive paths but not the pads, and using a photoresist mask to etch the diamond-like carbon layer over the pads and breaking down the silicon adhesive layer with a design voltage.
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Nunne William H.
Ruscello L. Vincent
Schultz Allan E.
King Roy V.
Seagate Technology Inc.
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