Dynamic magnetic information storage or retrieval – Head – Magnetoresistive reproducing head
Reexamination Certificate
1996-10-30
2001-04-10
Davis, David (Department: 2652)
Dynamic magnetic information storage or retrieval
Head
Magnetoresistive reproducing head
Reexamination Certificate
active
06215630
ABSTRACT:
BACKGROUND OF THE INVENTION
This invention is directed to a process for fabricating a thin film magnetic structure and the magnetic structure fabricated thereby.
Many magnetic transducers employ magnetic layers, or soft adjacent layers (SALs), adjacent an insulating material. In inductive heads, the insulating material might be used for a gap for the magnetic transducer. Typically, the insulating material is deposited first (such as on another magnetic layer or on a substrate) and the magnetic layer is patterned on top of the insulating layer. Typically, a photoresist is patterned in the desired shape of the magnetic layer and a wet chemical etchant is applied to the exposed portions of the magnetic layer to shape the magnetic layer into the desired pole. The etchant employed in removing unwanted portions of the magnetic layer also often attacks the desired insulating layer, resulting in a reduction of the thickness of the insulating layer and a compromise of the characteristics of the transducer. There is, accordingly, a need for an etchant stop to protect the insulating layer and to form a part of the resulting gap.
SUMMARY OF THE INVENTION
The present invention is directed to a magnetic structure having a magnetic layer and a layer of insulating material with a layer of diamond-like carbon sandwiched between the magnetic layer and the insulating layer. In one form of the invention, the structure is a magnetic transducer that includes a second magnetic layer and the insulating layer and layer of diamond-like carbon form a gap for the transducer.
According to one aspect of the present invention, a layer of diamond-like carbon is deposited onto the exposed surface of an insulating layer and a layer of magnetic material is deposited onto the layer of diamond-like carbon. A photoresist is applied to the exposed surface of the magnetic layer and is patterned to a desired shape. The exposed portions of the magnetic layer are removed with a wet chemical etchant that does not attack the diamond-like carbon layer. Thereafter, any remaining photoresist is removed. In one form of the invention, the insulating layer is deposited onto a base magnetic layer, and the insulating layer and layer of diamondlike carbon together form a gap for a magnetic transducer
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Nunne William H.
Ruscello L. Vincent
Schultz Allan E.
Davis David
Kinney & Lange , P.A.
Seagate Technology LLC
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