Diamond films and methods of making diamond films

Details Diamond films and methods of making diamond films Diamond films and methods of making diamond films

2007-12-11

2007-12-11

Turner, Archene (Department: 1775)

Chemistry of inorganic compounds

Carbon or compound thereof

Elemental carbon

C117S929000, C428S408000

Reexamination Certificate

active

10730967

ABSTRACT:
The present invention provides films and substrates coated with films that comprise a nano-crystalline diamond matrix that is substantially free of graphite inclusions. The present invention also provides a method of chemical vapor deposition to prepare the films. The method of chemical vapor deposition operates at a DC bias voltage that substantially precludes the formation of a plasma ion capable of causing a region of a nano-crystalline diamond matrix within a forming film to allotrope when the plasma ion collides with the film.

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