Diamond film thermistor

Electrical resistors – Resistance value responsive to a condition – Current and/or voltage

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H01C 710

Patent

active

050669389

ABSTRACT:
A diamond thin film thermistor having a substrate, an electrically insulating diamond layer formed on the substrate by vapor-phase synthesis, a semiconducting diamond layer as a temperature-sensing part on the electrically insulating diamond layer by vapor-phase synthesis, and metal thin film electrodes attached to the semiconducting diamond layer. A plurality of such diamond thin film thermistors can simultaneously be formed on a single substrate, and the substrate is cut with a dicing saw to provide individual diamond thin film thermistor chips of the same quality.

REFERENCES:
patent: 4806900 (1989-02-01), Fujimori et al.

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