Diamond film structures and methods related to same

Details Diamond film structures and methods related to same Diamond film structures and methods related to same

1994-01-07

1996-01-30

Turner, Archene

Electrical resistors

Granular or powdered element

Carbon particles

219482, 219541, 219553, H01L 21265

Patent

active

054883504

ABSTRACT:
Novel structures are provided including laminated layers of the diamond film in different patterns for conducting, generating and/or absorbing thermal energy. In particular, a thermal sensor/heater is shown including a doped electrically conductive diamond film layer encapsulated by layers of undoped electrically insulative layers on a silicon wafer. Also, a GaAs/Si on diamond laminate structure is provided in which the diamond film acts as a substrate and a heat sink. Notably, the diamond film structures are characterized by their high thermal conductivity, high chemical resistance, and high hardness/wear resistance due to the properties of the diamond films.

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Exhibit A is an article by A. Masood and M. Aslam and others entitled "Synthesis and electrical characterization of boron-doped thin diamond films", dated Oct. 12, 1992, published in Appl. Phys. Letter, vol. 61 (15), pp. 1832-1834 and published by the American Institute of Physics.
Exhibit B is an article by M. Aslam and A. Masood and others entitled "Thin Film Diamond Temperature Sensor Array for Harsh Aerospace Environment", dated Apr. 20, 1992, published at a Conference of SPIE in Orlando, Florida, SPIE Code No. 1694-20.
Exhibit C is an article by A. Masood and M. Aslam and others entitled "Techniques for Patterning of CVD Diamond Films on Non-Diamond Substrates", dated Nov. 1991, published in The Electrochemical Society, Inc., vol. 138, No. 11. The article discloses mixing diamond particles with photoresist and pattering the applied mixture, after which chemical vapor deposition (CVD) is used to grow a diamond film.
Exhibit D is an article by R. Erz et al. entitled "Preparation of smooth and Nanocystalline Diamond Films", dated 1993, copyrighted by Elsevier Sequoia, authors R. Erz et al. being associated with a German University.
Item E is a prior art mixture including diamond particles mixed with photoresist. The mixture was applied by spin coating to a planar substrate surface, as disclosed in the background of the specification of this application.
Exhibit F is a trade publication entitled Diamond Depositions, published by Superconductivity Publications, Inc., dated Nov. 22, 1991, vol. 2, No. 8, including pp. 1-24, that includes an article entitled "Aslam of Michigan State & Tamor of Ford Discover New Application for Diamond" on pp. 1 and 5-7 which describes potential applications and properties of piezoresistive devices including diamond films.

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