Diamond film growth from fullerene precursors

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state – Using an energy beam or field – a particle beam or field – or...

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117109, 117929, 423445B, 423446, C30B 2904

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active

056205120

ABSTRACT:
A method and system for manufacturing diamond film. The method involves forming a fullerene vapor, providing a noble gas stream and combining the gas with the fullerene vapor, passing the combined fullerene vapor and noble gas carrier stream into a chamber, forming a plasma in the chamber causing fragmentation of the fullerene and deposition of a diamond film on a substrate.

REFERENCES:
patent: 4559901 (1985-12-01), Morimoto et al.
patent: 4629631 (1986-12-01), Dearnaley
patent: 4634600 (1987-01-01), Shimizu et al.
patent: 4816286 (1989-03-01), Hirose
patent: 5015494 (1991-05-01), Yamazaki
patent: 5132105 (1992-07-01), Remo
patent: 5209916 (1993-05-01), Gruen
patent: 5273788 (1993-12-01), Yu
patent: 5328676 (1994-07-01), Gruer
patent: 5360477 (1994-11-01), Inoue et al.
patent: 5370855 (1994-12-01), Gruen
Parker, D.H. et al, "High Yield Synthesis, Separation and Mass Spectrometric Characterization of Fullerenes C.sub.60 to C.sub.266 "; J. Am. Chem. Sco. 113, 7499-7503 (1991).
Wurz, P. and Lykke, R.; "Delayed Electron Emission from Photoexcited C.sub.60 "; J. Chem. Phys. 95, 7008-7010 (1991).
Lykke, K.R. et al,, "Spectrometric Characterization of Purified C.sub.60 and C.sub.70 "; Mats. Res. Soc. Symposium Proc. vol. 206, 679 (1991).
Wasielewski, M.R., et al. "Triplet States of Fullernes C.sub.60 and C.sub.70 ; Electron Paramagnetic Resonance Spectra, Photophysics and Electronic Structures"; J. Am. Chem. Soc. 113, 2774-2776 (1991).
Beck, Rainer D. et al, "Resilience of All-Carbon Molecules C.sub.60 and C.sub.84 ". A Surface-Scattering Time-of-Flight Investigation; J. Chem. Phys. 1991, 95, 8402-8409.
Van, Jon; "Exotic Form Opens New Carbon Uses"; Chicago Tribune, Sunday Nov. 3, 1991.
Angus, John C. et al; "Metastable Growth of Diamond and Diamond-Like Phases"; Annu. Rev. Mater. Sci. 1991. 21:221-48.
Curl, Robert F. et al; "Fullerenes"; Sci Amer. Oct. 1991, 54-63.
Meijer, Gerard et al; "Laser Deposition of Carbon Clusters on Surfaces: A New Approach to the Study of Fullernes"; J. Chem. Phys. 93(11), Dec. 1990.
Edelson, Edward; "Buckyball The Magic Molecule"; Popular Science, Aug. 1991, 52-57; 87.
Kroto, H.W. et al; "C.sub.60 : Buckminster Fullerene"; Chem. Rev. 1991, 91, 1213-1235.
Kratschmer, W. et al.; "Solid C.sub.60 : A New Form of Carbon", Nature, vol. 347, 27 Sep. 1990, pp. 354-358.
Wang, H. H. et al. "Superconductivity at 28.6 K in a Rubidium--C.sub.60 Fullerene Compound, Rb.sub.x C.sub.60, Synthesized by a Solution Phase Technique," Inorg. Chem. 30. 2962, (1991).
Frenklach, Michael et al; "Growth Mechanism of Vapor-Deposited Diamond"; J. Mater. Res. 3(1) Jan./Feb. 1988, 133-139.
"Near specular reflection of C.sub.60 ions in collisions with an HOPG graphic surface", Busmann, H. G. et al., Chem. Phys. Ltrs. 187, 459 (1991).
Moffat, A.S., "When Diamonds Met Buckyballs," Science, vol. 254, Nov. 8, 1991, p. 800.
Meilunas et al, "Nucleation of diamond films on surfaces using carbon clusters," Applied Physics Letters, vol. 59, No. 26 Dec. 23, 1991, pp. 3661-3463.
Meilunas et al., "Activated C.sub.70 and diamond", Nature, 354, Nov. 28, 1991, p. 271.
Regueiro et al., "Crushing C.sub.60 to diamond at room temperature," Nature, 355, Jan. 16, 1992, pp. 237-239.
Geis et al., "Diamond Film Semiconductors," Sci. Amer., Oct. 1992, pp. 84-89.
Wang et al., "First Easily Reproduced Solution-Phase Synthesis and Confirmation of Superconductivity in the Fullerene K.sub.x C.sub.60 (T.sub.c =18.0.+-.0.1K)," Inorg. Chem., 1991, 30.
Gao et al, "Study on Fullerene (C60) And Diamond Single Crystals By Using a Microscope", Rengeng Jengti Xuebao (1992), 21(3) pp. 273-279 abs. only.

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