Diamond electronic device and process for producing the same

Details Diamond electronic device and process for producing the same Diamond electronic device and process for producing the same

1995-06-06

1997-05-27

Kunemund, Robert

Single-crystal, oriented-crystal, and epitaxy growth processes;

Forming from vapor or gaseous state

With decomposition of a precursor

117 95, 117913, 117929, C30B 2904

Patent

active

056328125

ABSTRACT:
A diamond electronic device constituted of a diamond crystal formed on a substrate comprises a diamond crystal having the ratio (h/L) of length (h) of the diamond crystal in direction substantially perpendicular to the face of the substrate to length (L) of the diamond crystal in direction parallel to the face of the substrate ranging from 1/4 to 1/1000 and an upper face of the diamond crystal making an angle of from substantially 0.degree. to 10.degree. to the face of the substrate, and a semiconductor layer and an electrode layer provided on the diamond crystal, wherein the diamond crystal serves as a heat-radiating layer.

REFERENCES:
patent: 5197651 (1993-03-01), Nakamura et al.
patent: 5260141 (1993-11-01), Tsai et al.
patent: 5306928 (1994-04-01), Kimoto et al.

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