Coating apparatus – With vacuum or fluid pressure chamber
Patent
1989-04-04
1993-11-16
Bueker, Richard
Coating apparatus
With vacuum or fluid pressure chamber
118724, 118730, C23C 1600
Patent
active
052619591
ABSTRACT:
The steady state operating parameters of a low pressure chemical vapor deposition process for making diamond, i.e., nucleation-growth and graphite removal, are applied as controlled sequential steps to favor nucleation and growth.
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patent: 4058430 (1977-11-01), Suntola
patent: 4434188 (1984-02-01), Kamo
patent: 4664743 (1987-05-01), Moss
patent: 4707384 (1987-11-01), Schachner
patent: 4806321 (1989-02-01), Nishizawa
patent: 4986214 (1991-01-01), Zumoto
Bueker Richard
General Electric Company
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