Diamond covered member and process for producing the same

Details Diamond covered member and process for producing the same Diamond covered member and process for producing the same

1994-03-09

1996-01-09

Monin, Jr., Donald L.

Active solid-state devices (e.g., transistors, solid-state diode

Specified wide band gap semiconductor material other than...

Diamond or silicon carbide

257627, 427314, 427590, H01L 29161, H01L 2920, B05D 306

Patent

active

054830842

ABSTRACT:
A diamond covered member is provided which has a diamond crystal layer formed by vapor phase synthesis on a surface of a substrate, the diamond crystal layer being constituted of plate-shaped diamond crystals at least at an initial stage of crystal growth, and being a polycrystal film formed by growth and coalescence of the plate-shaped diamond crystals, and the polycrystal film being uniformly oriented and having surface roughness (Rmax) of not larger than 0.2 .mu.m. A process for producing the diamond covered member is also provided. The diamond covered member has high hardness, high thermal conductivity, and high chemical stability.

REFERENCES:
patent: 5186973 (1993-02-01), Garg et al.
patent: 5197651 (1993-03-01), Nakamura et al.
patent: 5240749 (1993-08-01), Chow
J. Appl. Phys. (USA), Journal of Applied Physics, 1 May 1991, USA, 69, 9, 6456-6460 ISSN 0021-8979; DeNatale J. F. et al. "Microstructure and orientation effects in diamond thin films".
Appl. Phys. Lett. (USA), Applied Physics Letters, 25 Jan. 1993, USA, 62, 4, 354-356 ISSN 0003-6951, Hirabayashi, K. et al. `Morphology of flattened diamond crystals synthesized by the oxy-acetylene flame method`.
J. Appl. Phys. (USA), Journal of Applied Physics, 1 Nov. 1992, USA, 72, 9, 4083-4087 ISSN 0021-8979 Hirabayashi, K. "Surface microstructures of diamond crystals synthesized in the H/sub 2/-CH/sub 4/0/sub 2/system".
Journal of Materials Research, Nov. 1992, USA, 7, 11, 3001-3009 ISSN 0884-2914 Angus J. C. et al. `Twinning and faceting in early stages of diamond growth by chemical vapor deposition`.

Affiliated with

Also associated with

Rating

Diamond covered member and process for producing the same does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Diamond covered member and process for producing the same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Diamond covered member and process for producing the same will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1304244