Diamond-based electrical resistor component

Details Diamond-based electrical resistor component Diamond-based electrical resistor component

2008-07-01

2008-07-01

Dickey, Thomas L. (Department: 2826)

Semiconductor device manufacturing: process

Having diamond semiconductor component

C438S050000, C438S125000

Reexamination Certificate

active

10513864

ABSTRACT:
The invention relates to an electrical component having a resistance area and contacts electrically connected to the resistance area, the resistance area including electrically conductive diamond. The resistance area can be configured as a resistance layer on top of a substrate while the substrate can be made at least in part of electrically non-conducting diamond.

REFERENCES:
patent: 5348909 (1994-09-01), Stasiak
patent: 6614095 (2003-09-01), Adamschik et al.
patent: 2002/0044174 (2002-04-01), Hofer et al.
patent: 2003/0109867 (2003-06-01), Gluche et al.
patent: 99/63596 (1999-12-01), None
M. Werner et al., “Thermistor based on doped polycrystalline diamond thin films,” Diamond and Related Materials, 1 (1992), Elsevier Science Publishers, B.V., Amsterdam, pp. 669-672.
W. Hanni et al., “Selective area deposition of diamond on 4 in Si wafers,” Thin Solid Films, 236 (1993), Elsevier Sequoia, Lausanne, Switzerland, pp. 87-90.

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