Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from liquid or supercritical state – Having pulling during growth
Patent
1997-12-15
1999-10-05
Garrett, Felisa
Single-crystal, oriented-crystal, and epitaxy growth processes;
Processes of growth from liquid or supercritical state
Having pulling during growth
117 15, 117201, 117202, C30B 1526
Patent
active
059617160
ABSTRACT:
A CCD camera is used to measure the diameter of a growing crystal through optical recognition of the luminous ring at a crystal-melt interface. The result is an optical diameter control method and apparatus that eliminates the negative effects of orbit, melt-level and incorrect camera angle. The CCD camera is positioned such that it focuses on a full half of the circumference of the crystal as it is being grown. An automatic control system uses two points diametrically opposed on the crystal to measure the diameter, and a third point on the crystal closest to the camera to compute the melt level error. The automatic control system controls a crucible height and a crystal pull rate to optimize crystal diameter.
REFERENCES:
patent: 3998598 (1976-12-01), Bonora
patent: 4350557 (1982-09-01), Scholl et al.
patent: 4915775 (1990-04-01), Katsuoka et al.
patent: 5138179 (1992-08-01), Baba et al.
patent: 5170061 (1992-12-01), Baba
patent: 5653799 (1997-08-01), Fuerhoff
patent: 5656078 (1997-08-01), Fuerhoff
patent: 5660629 (1997-08-01), Shiraishi et al.
patent: 5665159 (1997-09-01), Fuerhoff
patent: 5746825 (1998-05-01), Von Ammon et al.
"Monitoring Diameter Variation and Diameter Control Using Laser Beam and Image Processing in Czochralski Crystal Growth", IBM Technical Disclosure Bulletin, vol. 27, No. 10A, pp. 5777-5778 (Mar. 1985).
"The Basis of Automatic Diameter Control Utilizing "Bright Ring" Meniscus Reflections", T. G. Digges, Jr., Journal of Crystal Growth, vol. 29, pp. 326-328 (1975).
Vickrey David J.
White Barton V.
Garrett Felisa
SEH America Inc.
LandOfFree
Diameter and melt measurement method used in automatically contr does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Diameter and melt measurement method used in automatically contr, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Diameter and melt measurement method used in automatically contr will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1166448