Data processing: measuring – calibrating – or testing – Measurement system – Performance or efficiency evaluation
Reexamination Certificate
2011-08-16
2011-08-16
Tsai, Carol S (Department: 2857)
Data processing: measuring, calibrating, or testing
Measurement system
Performance or efficiency evaluation
C365S226000, C324S719000, C324S765010, C324S537000, C324S762010, C438S014000, C438S017000, C327S516000
Reexamination Certificate
active
08000935
ABSTRACT:
A diagnostic method of and computer system for root-cause analysis of performance variations of FETs in integrated circuits and a method and computer system for monitoring a field effect transistor manufacturing process. The diagnostic method includes measuring source currents in the linear and saturated regions of two FETs, calculating ratios of the source currents in the linear and saturated regions for the and two FETs and comparing the ratios of the two FETs to determine a probable root cause for a performance variation between the two FETs. One of the FETs has a known good performance.
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International Business Machines - Corporation
Schmeiser Olsen & Watts
Schnurmann Daniel
Tsai Carol S
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