Di-p-xylylene polymer and method for making the same

Details Di-p-xylylene polymer and method for making the same Di-p-xylylene polymer and method for making the same

1983-03-02

1985-02-19

Briggs, Sr., Wilbert J.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

204168, 204170, 427 13, 427 41, 528393, B05D 104, B05D 106

Patent

active

045005621

ABSTRACT:
A method and apparatus for forming an improved poly-p-xylylene film. Solid di-para-xylylene dimer is sublimed in a sublimation furnace at approximately 100.degree. to 200.degree. C. and subsequently conducted to a pyrolysis furnace where it is pyrolyzed to the diradical p-xylylene monomer while in the vapor state at approximately 600 degrees C. The diradical monomer is then introduced into a deposition chamber for deposition onto a suitable substrate. The deposition chamber includes electrodes for producing a low pressure plasma through which the diradical monomer passes prior to deposition. The interaction of the diradical monomer with the low pressure plasma results in the formation of poly-p-xylylene film which is exceptionally hard and thermally stable.

REFERENCES:
patent: 3246627 (1966-04-01), Loeb et al.
patent: 3300332 (1967-01-01), Gorham et al.
patent: 3301707 (1967-01-01), Loeb et al.
patent: 3429739 (1969-02-01), Tittman et al.
patent: 3491142 (1970-01-01), Yeh et al.
patent: 3503903 (1970-03-01), Shaw et al.
patent: 3518108 (1970-06-01), Heiss et al.
patent: 3573968 (1971-04-01), Loeb et al.
patent: 3666533 (1972-05-01), Lee
patent: 4176209 (1979-11-01), Baker et al.
patent: 4212719 (1980-07-01), Osada et al.
patent: 4284678 (1981-08-01), Jones
patent: 4291244 (1981-09-01), Beach et al.
patent: 4365587 (1982-12-01), Hirose et al.
R. Liepins et al., "Plastic Coating of Microsphere Substrates", Jour. Vac. Sci. Technol., 18(3), Apr. 1981.
Gorham, W. F., "A New, General Synthetic Method for the Preparation of Linear Poly-p-Xylylenes", J. Polymer Sci. A-1, vol. 4, p. 3027, (1966).

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