Thermal measuring and testing – Transformation point determination – By electrical condition of specimen
Patent
1998-11-02
2000-10-03
Bennett, G. Bradley
Thermal measuring and testing
Transformation point determination
By electrical condition of specimen
374 16, 374118, 374 28, G01N 2502, G01N 1126
Patent
active
061263117
ABSTRACT:
A dew point sensor includes a micro-cantilever beam formed on a substrate. A cooling device and a temperature sensor are in thermal contact with the micro-cantilever beam and a control circuit is coupled to the micro-cantilever beam, the cooling device and the temperature sensor. The control circuit controls and monitors a resonance of the micro-cantilever beam, controls a temperature of the cooling device and receives a temperature indication from the temperature sensor. Using the above information, the dew point temperature is determined by identifying the temperature of the micro-cantilever beam when its resonance changes due to a change in mass caused by the formation of dew on the micro-cantilever beam when the dew point is reached. A method of determining the dew point is also disclosed. The method includes exciting a micro-cantilever beam in a vibratory mode and decreasing a temperature of the micro-cantilever beam. When the temperature of the micro-cantilever beam reaches the dew point, dew forms thereon, thus changing its mass which causes a resonance of the micro-cantilever beam to change. The resonance of the beam is then monitored to detect the dew point.
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Bennett G. Bradley
Claud S. Gordon Company
Verbitsky G.
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