Devices using transparent conductive GaInO.sub.3 films

Details Devices using transparent conductive GaInO.sub.3 films Devices using transparent conductive GaInO.sub.3 films

1993-10-27

1997-07-29

Robinson, Ellis P.

Stock material or miscellaneous articles

Composite

Of quartz or glass

428336, 428432, 428469, 428472, 428689, 428697, 428702, B32B 1706

Patent

active

056520620

ABSTRACT:
Applicants have discovered that films of conductively doped GaInO.sub.3 grown on substrates by pulsed laser deposition have conductivity comparable to conventional wide band-gap transparent conductors while exhibiting superior light transmission, particularly in the green and blue wavelength regions of the visible spectrum. Substrate temperatures ranged from room temperature to 350.degree. C. in an ambient containing oxygen at partial pressure in the range 0.1 mTorr to 100 mTorr. The preferred laser source was an excimer laser operating in the deep ultraviolet.

REFERENCES:
patent: 4187336 (1980-02-01), Gordon
patent: 4595634 (1986-06-01), Gordon

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