Devices, systems, and methods for carbonation of deionized...

Details Devices, systems, and methods for carbonation of deionized... Devices, systems, and methods for carbonation of deionized...

2007-10-17

2010-06-08

Chiesa, Richard L (Department: 1797)

Gas and liquid contact apparatus

Fluid distribution

Pumping

C261S064100, C261S066000, C261SDIG070

Reexamination Certificate

active

07731161

ABSTRACT:
Devices, systems, and methods employed in wet cleaning semiconductor devices are provided. In particular, systems that can deliver deionized water with the desired concentration of CO2 and methods of generating deionized water with a desired concentration of CO2 for use in wet cleaning of semiconductor devices are provided.

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