Devices involving silicon glasses

Details Devices involving silicon glasses Devices involving silicon glasses

1988-02-29

1989-05-02

Silverberg, Sam

Coating processes

Centrifugal force utilized

437238, 437231, B05D 312

Patent

active

048267090

ABSTRACT:
A sol-gel process is utilized for producing silicon oxide glasses useful in the manufacture of devices such as semiconductor devices. These glasses are easily deposited by techniques such as spinning. Not only is the glass easily applied, but also has advantageous electrical, etching, and mechanical properties. Thus, these glasses are useful in applications such as passivating layers for integrated circuit devices and as intermediary layers in trilevel lithography for the production of such devices.

REFERENCES:
patent: 4652467 (1987-03-01), Brinker
patent: 4719125 (1988-01-01), Anillo

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