Devices incorporating soft ionization membrane

Details Devices incorporating soft ionization membrane Devices incorporating soft ionization membrane

2005-09-06

2005-09-06

Wells, Nikita (Department: 2881)

Radiant energy

Ion generation

Field ionization type

C250S382000, C250S287000, C250S286000

Reexamination Certificate

active

06940074

ABSTRACT:
Devices are disclosed that incorporate an ionization device for generating ions and electrons having first and second conductive electrodes that are separated by less than the mean-free-path of molecules being ionized. Electrons generated by the ionization device may be used for applications such as light sources, electron bombardment sensors, thyratrons, vacuum tubes, plasma displays, and microwave switches, and ions generated by the ionization device may be used, inter alia, in connection with ion focused milling devices, maskless ion implantation devices, ion beam lithography devices, semiconductor mask modification devices, and semiconductor chip wiring devices. Methods of use and manufacture are also provided.

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