Devices and methods for aligning a stamp and a substrate

Details Devices and methods for aligning a stamp and a substrate Devices and methods for aligning a stamp and a substrate

2007-08-07

2007-08-07

Gupta, Yogendra N. (Department: 1722)

Plastic article or earthenware shaping or treating: apparatus

Control means responsive to or actuated by means sensing or...

Temperature control

C425S150000, C425S170000, C425S172000, C425S412000, C033S0010MP, C033S613000

Reexamination Certificate

active

10464478

ABSTRACT:
There is provided a device for transferring a pattern from a stamp to a substrate, provided with a moldable film, by pressing the stamp and the substrate against each other. The device comprises at least one fixture for retaining a planar object such as the stamp or the substrate. The device is distinguished in that it comprises a heating element for heating the planar object, and measuring arrangement for determining a change in the size of the planar object due to the heating.

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