Device transferring system, device transferring method, and...

Details Device transferring system, device transferring method, and... Device transferring system, device transferring method, and...

2006-05-17

2009-08-11

Booth, Richard A. (Department: 2812)

Semiconductor device manufacturing: process

With measuring or testing

C438S455000

Reexamination Certificate

active

07572649

ABSTRACT:
A device transferring system includes a first substrate support portion on which to mount a first substrate, a second substrate support portion for supporting a second substrate opposed to the first substrate, a swinging unit for regulating the position of the first substrate support portion so that a device on the first substrate makes contact with the second substrate side in parallel to the second substrate, a movable stage for supporting and moving the swinging unit, a sensor unit for sensing the condition where the device on the first substrate has made contact with the second substrate side, the sensor unit being provided between the first substrate support portion and a sensor support portion formed in the swinging unit, and a measuring unit61for measuring the position of stop of a motion of the first substrate due to the contact of the first substrate with the second substrate, and for measuring the moving amount of the swinging unit after the approaching motion of the first substrate is stopped.

REFERENCES:
patent: 2005/0233504 (2005-10-01), Doi et al.
patent: 2004-273596 (2004-09-01), None
patent: 2004-281630 (2004-10-01), None

Affiliated with

Also associated with

Rating

Device transferring system, device transferring method, and... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Device transferring system, device transferring method, and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Device transferring system, device transferring method, and... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4101665