Device to determine the thickness of a conductive layer

Details Device to determine the thickness of a conductive layer Device to determine the thickness of a conductive layer

2007-08-28

2007-08-28

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

Dimension

Thickness

C356S630000, C324S230000

Reexamination Certificate

active

10513303

ABSTRACT:
The device comprises at least a measuring head (7) with a transmitter (7A) and a receiver (7B). The head comprises means to measure the thickness through surface resistivity and optical means to measure said thickness by measuring the transparency of the substrate and of the relative layer applied to it.

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