Measuring and testing – Vibration – By mechanical waves
Reexamination Certificate
2006-03-02
2010-06-01
Saint Surin, J M (Department: 2856)
Measuring and testing
Vibration
By mechanical waves
C073S584000, C073S662000, C310S334000
Reexamination Certificate
active
07726190
ABSTRACT:
A speaker unit has a plurality of sound sources each outputting a sound wave. The compressional, sound wave output from the speaker unit arrives, or vibrates air, which moves a movable part of a three-axis acceleration sensor, or a microstructure of a chip to be tested TP. As the movable part thus moves, a value in resistance accordingly varies, and such variation is measured as based on an output voltage provided via a probe. A control unit determines a property of the three-axis acceleration sensor from a value in property as measured or measurement data. Furthermore, the plurality of sound sources can be spaced by a pitch of a predetermined value set as based on their difference in the distance to the movable part of the three-axis acceleration sensor and the wavelength of the test wave to apply a composite test wave to the movable part such that the composite sound wave's composite sound field is maximized.
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Enjoji Keiichi
Hayashi Masato
Ikeuchi Naoki
Matsumoto Toshiyuki
Yakabe Masami
Finnegan Henderson Farabow Garrett & Dunner LLP
M Saint Surin J
Tokyo Electron Limited
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