Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
Patent
1998-05-05
2000-07-11
Young, Christohper G.
Radiation imagery chemistry: process, composition, or product th
Including control feature responsive to a test or measurement
430311, G03F 900
Patent
active
060870532
ABSTRACT:
An exposure method includes the steps of transferring, by exposure, a pattern formed on an original to different shot regions on a substrate sequentially, and performing, during exposure of a certain shot, at least one of (i) adjusting a relative positional relation between the original and the substrate, with respect to a direction effective to correct translation of a transfer region of the substrate due to thermal distortion thereof, and (ii) adjusting a transfer magnification of the pattern of the original to the substrate so as to correct enlargement of the transfer region due to thermal distortion of the substrate. In one preferred form, the adjustment is made in accordance with a correction table related to thermal expansion of the substrate during exposure and being prepared on the basis of one of a calculation and a preparatory exposure experiment. In another preferred form, the transfer magnification is adjusted by deforming the original, and in a further preferred form, the transfer magnification is adjusted by adjusting a projection optical system for projecting the pattern of the original to the substrate.
REFERENCES:
patent: 4592081 (1986-05-01), Eaton et al.
patent: 5184176 (1993-02-01), Unno et al.
patent: 5604779 (1997-02-01), Amemiya et al.
patent: 5912096 (1999-06-01), Hada
Canon Kabushiki Kaisha
Young Christohper G.
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