Device manufacturing method utilizing concentric fan-shaped patt

Details Device manufacturing method utilizing concentric fan-shaped patt Device manufacturing method utilizing concentric fan-shaped patt

1998-06-26

2000-07-04

Young, Christopher G.

Radiation imagery chemistry: process, composition, or product th

Registration or layout process other than color proofing

430302, 430311, 430321, G03F 900

Patent

active

060836504

ABSTRACT:
A method of manufacturing an element with a concentric pattern by use of a photolithographic process is disclosed, wherein the method includes preparing masks having segment patterns corresponding to fan-shaped regions, respectively, of the pattern which fan-shaped regions can be defined by dividing the pattern by at least one circle concentric with the pattern to provide plural zones and then by dividing each zone equiangularly, and-exposing regions of a substrate corresponding to the plural zones, respectively, by using the masks corresponding to the zones, respectively, while rotating the substrate by regular angles.

REFERENCES:
patent: 4895790 (1990-01-01), Swanson et al.
patent: 5156943 (1992-10-01), Whitney
patent: 5483343 (1996-01-01), Iwamoto et al.

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