Photocopying – Projection printing and copying cameras – Detailed holder for original
Reexamination Certificate
2011-04-26
2011-04-26
Nguyen, Hung Henry (Department: 2882)
Photocopying
Projection printing and copying cameras
Detailed holder for original
Reexamination Certificate
active
07933000
ABSTRACT:
A lithographic apparatus includes an illumination system configured to condition a radiation beam; a support constructed to support a patterning device, the patterning device being capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam; a substrate table constructed to hold a substrate; and a projection system configured to project the patterned radiation beam onto a target portion of the substrate. An applicator, such as a humidifier is provided to provide molecules, such as water molecules, to a clamp area of the patterning device.
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Machine translation of JP 2004-140271 A, May 13, 2004.
Human translation of paragraph [0057] of JP 2004-140271 A, May 13, 2004.
Bijvoet Dirk-Jan
Onvlee Johannes
ASML Netherlands B.V.
Nguyen Hung Henry
Pillsbury Winthrop Shaw & Pittman LLP
Whitesell-Gordon Steven H
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