Photocopying – Projection printing and copying cameras – Distortion introducing or rectifying
Reexamination Certificate
2005-04-12
2005-04-12
Mathews, Alan (Department: 2851)
Photocopying
Projection printing and copying cameras
Distortion introducing or rectifying
C355S053000, C430S022000, C430S030000
Reexamination Certificate
active
06879374
ABSTRACT:
A device manufacturing method according to one embodiment of the invention includes positioning a reflective patterning structure to reflect at least a portion of a beam of radiation as a patterned beam of radiation having a pattern in its cross-section. The method also includes using a projection system to project the patterned beam of radiation to form an image on a target portion of a layer of radiation-sensitive material. Positioning includes at least one among shifting and tilting a nominal reflective surface of the reflective patterning structure with respect to a nominal object plane of the projection system according to a distortion value.
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A copy of the European Search Report dated Dec. 21, 2001 issued in a counterpart European Application No. EP 01 30 5341.
Leenders Martinus Hendrikus Antonius
Loopstra Erik Roelof
Meiling Hans
Moors Johannes Hubertus Josephina
Van Der Werf Jan Evert
ASML Netherlands B.V.
Mathews Alan
Pillsbury & Winthrop LLP
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