Device manufacturing method, computer program product and...

Details Device manufacturing method, computer program product and... Device manufacturing method, computer program product and...

2007-12-10

2008-11-25

Rutledge, Della J. (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C378S034000, C378S035000

Reexamination Certificate

active

07456931

ABSTRACT:
A method of optimizing adjustable settings of adjustable elements of a projection system in a lithographic apparatus is disclosed that includes determining an object spectrum for a pattern and an illumination arrangement, determining a symmetry of the object spectrum, constructing a merit function for a wavefront in a pupil plane of the projection system with the settings of the adjustable elements as variables with reference to the symmetry, and optimizing the merit function.

REFERENCES:
patent: 6563566 (2003-05-01), Rosenbluth et al.
patent: 7233386 (2007-06-01), Reisinger et al.
patent: 7301622 (2007-11-01), Geh et al.
patent: 7307690 (2007-12-01), De Winter et al.
patent: 2008/0143985 (2008-06-01), Mast et al.

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