Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
Reexamination Certificate
2007-03-05
2010-11-09
Young, Christopher G (Department: 1795)
Radiation imagery chemistry: process, composition, or product th
Including control feature responsive to a test or measurement
C382S145000, C382S149000
Reexamination Certificate
active
07829249
ABSTRACT:
In a device manufacturing method using a lithographic apparatus, corrections to the dose are applied, within and/or between fields, to compensate for CD variations due to heating of elements of the projection system of the lithographic apparatus.
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Akhssay M'hamed
El Ouasdad Mamoun
Uasghiri Asis
Van De Kerkhof Marcus Adrianus
ASML Netherlands B.V.
Sterne Kessler Goldstein & Fox P.L.L.C.
Young Christopher G
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