Device manufacturing method and lithographic apparatus

Details Device manufacturing method and lithographic apparatus Device manufacturing method and lithographic apparatus

2008-09-16

2008-09-16

Rutledge, Della J. (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S067000, C355S071000, C355S077000, C378S034000

Reexamination Certificate

active

11654037

ABSTRACT:
A device manufacturing method includes bringing pressure within a vacuum chamber of a lithographic projection apparatus to a temperature stabilizing pressure range; keeping the pressure within the vacuum chamber within the temperature stabilizing pressure range for a period of time so as to stabilize the temperature in the vacuum chamber; decreasing the pressure within the vacuum chamber to a production pressure range; generating a beam of radiation with a radiation system; patterning the beam of radiation; and projecting the patterned beam of radiation through the vacuum chamber onto a target portion of a layer of radiation-sensitive material on a substrate.

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International Search Report and Written Opinion for International Application No. PCT/IB2008/050160 dated Jul. 1, 2008.

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