Device manufacturing method and apparatus with applied...

Details Device manufacturing method and apparatus with applied... Device manufacturing method and apparatus with applied...

2004-04-14

2008-12-09

Kim, Peter B (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S053000

Reexamination Certificate

active

07463336

ABSTRACT:
A method of fabricating a device using a lithographic process, the method comprising applying a layer of radiation sensitive resist on top of the device, applying a metallic layer on top of the resist layer, and exposing a part of the resist layer to radiation while coupling the metallic layer to a fixed potential so as to apply an electric field across the resist layer, the direction of the electric field being substantially perpendicular to the plane of the resist layer.

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