Device manufacture involving lithographic processing

Details Device manufacture involving lithographic processing Device manufacture involving lithographic processing

1989-08-07

1992-01-07

Bowers, Jr., Charles L.

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

430296, 430311, 430395, 430396, 430494, 430966, 430967, 430 5, G03F 900

Patent

active

050791125

ABSTRACT:
Fabrication of devices of micron and submicron minimum feature size is accomplished by lithographic processing involving a back focal plane filter. A particularly important fabrication approach depends upon mask patterns which produce images based on descrimination as between scattered and unscattered radiation.

REFERENCES:
patent: 3105761 (1963-10-01), Foris
patent: 3630598 (1971-12-01), Little, Jr.
patent: 3748468 (1973-07-01), Hartman
patent: 3862843 (1975-01-01), Lerner
Ludwig Reimer, "Transmission Electron Microscopy", Springer Verlag, Berlin, Heidelberg, New York, 1984, pp. 186-198.

Affiliated with

Also associated with

Rating

Device manufacture involving lithographic processing does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Device manufacture involving lithographic processing, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Device manufacture involving lithographic processing will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-821493