Device made of single-crystal silicon

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package – Outside periphery of package having specified shape or...

Reexamination Certificate

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C257S684000, C257S697000, C257S724000, C257SE21056, C257SE21561, C257SE21564, C257SE23004, C257SE25012, C257SE29022

Reexamination Certificate

active

07834452

ABSTRACT:
A device made of single-crystal silicon having a first side, a second side which is situated opposite to the first side, and a third side which extends from the first side to the second side, the first side and the second side each extending in a100plane of the single-crystal silicon, the third side extending in a first area in a111plane of the single-crystal silicon. The third side extends in a second area in a110plane of the single-crystal silicon. Furthermore, a production method for producing a device made of single-crystal silicon is described.

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patent: 7114312 (2006-10-01), Coppeta et al.
patent: 7413846 (2008-08-01), Maloney et al.
patent: 2008/0115361 (2008-05-01), Santini et al.

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