Device level identification methodology

Details Device level identification methodology Device level identification methodology

1998-08-07

2000-05-16

Bowers, Charles

Semiconductor device manufacturing: process

Formation of electrically isolated lateral semiconductive...

Having substrate registration feature

438462, 438800, H01L 2176

Patent

active

060636858

ABSTRACT:
A method of identifying individual semiconductor devices with a unique inscription during the manufacturing process for the semiconductor devices. Each individual semiconductor device is marked during a final lithographic stepping exposure with a direct write laser mounted either in the stepper in the lithographic system working concurrently with the stepping fields during the final metal layer lithographic stepping exposure or during a post stepping pre-development treatment. The marking on the devices includes device identification, lot number and die number.

REFERENCES:
patent: 5093550 (1992-03-01), Gerber et al.
patent: 5410124 (1995-04-01), Jackson
patent: 5733711 (1998-03-01), Juengling

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