Device including piezoelectric thin film and a support...

Details Device including piezoelectric thin film and a support... Device including piezoelectric thin film and a support...

2006-10-13

2009-11-24

Summons, Barbara (Department: 2817)

Wave transmission lines and networks

Plural channel systems

Having branched circuits

C333S105000, C333S187000, C333S262000, C310S330000, C310S348000, C200S181000

Reexamination Certificate

active

07623007

ABSTRACT:
An acoustic resonator includes a substrate, a support section provided on the substrate, a lower electrode provided on the support section, a piezoelectric body provided on the lower electrode, and an upper electrode provided on the piezoelectric body. The lower electrode, the piezoelectric body and the upper electrode form a vibration section. The support section for supporting the vibration section is shaped such that at least one portion of a vertical cross-section thereof has a curvature.

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