Device including a tapered microminiature silicon structure

Details Device including a tapered microminiature silicon structure Device including a tapered microminiature silicon structure

1992-06-02

1993-04-20

DeMeo, Palmer C.

Electric lamp and discharge devices

Electrode and shield structures

Point source cathodes

313309, 313351, H01J 130, H01J 1924

Patent

active

052045811

ABSTRACT:
Tapered silicon structures, of interest for use, e.g., in atomic force microscopes, in field-emission devices, and in solid-state devices are made using silicon processing technology. Resulting tapered structures have, at their tip, a radius of curvature of 10 nanometers or less.

REFERENCES:
patent: 2817002 (1957-12-01), Dyke et al.
patent: 3852595 (1974-12-01), Aberth
patent: 3970887 (1976-07-01), Smith et al.
patent: 4307507 (1991-12-01), Gray et al.
patent: 4513308 (1985-04-01), Greene et al.
patent: 4588614 (1986-03-01), Gray et al.
patent: 4685996 (1987-08-01), Busta et al.
patent: 4721885 (1988-01-01), Brodie et al.
patent: 4766340 (1988-08-01), van der Mast et al.
patent: 4940916 (1990-07-01), Borel et al.
patent: 4968382 (1990-11-01), Jacobson et al.
patent: 5100355 (1992-03-01), Marcus et al.
R. B. Marcus et al, "A novel vacuum microelectronics electron field emitter," The First International Vacuum Microelectronics Conference Proceedings, Jun. 13-15, 1988, sponsored by The Electron Device Society of the IEEE.
C. E. Holland et al, "Spindt cold cathode vacuum fluorescent display," Proceedings of the EuroDisplay 87, pp. 1-3, Sep. 1987.
R. Greene et al, "Vacuum integrated circuits," Proceedings of the International Electron Devices Meeting, pp. 172-175, Dec. 1985.
C. A. Spindt et al, "Physical properties of thin-film field emission cathodes with molybdenum cones," Journal of Applied Physics, Jul. 1976 vol. 47, pp. 5248-5263.
J. B. Warren, "Control of silicon field emitter shape with isotropically etched oxide masks," Proceedings of the Second International Conference on Vacuum Microelectronics, Jul. 1989, pp. 37-40.
D. Stephani et al, "Fabrication of densely packed sharp silicon field emitters using dry etching techniques," Proceedings of the Second International Conference on Vacuum Microelectronics, Jul. 1989, p. 18.
D. J. Elliott, "Integrated Circuit Fabrication Technology," Dec. 1989, Second Edition, McGraw-Hill Publishing Company, New York.
E. Yablonovitch et al, "Unusually Low Surface-Recombination Velocity on Silicon and Germanium Surfaces," Physical Review Letters, vol. 57, pp. 249-252. Jul. 1986.

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