Device including a substrate-supported optical waveguide, and me

Details Device including a substrate-supported optical waveguide, and me Device including a substrate-supported optical waveguide, and me

1988-03-03

1990-02-20

Lee, John D.

350 9629, G02B 610

Patent

active

049020862

ABSTRACT:
In the manufacture of optical devices such as, e.g., optical communications assemblies and optical gyroscopes, low-loss substrate-supported optical waveguides are desired. Such waveguides can be obtained by patterning a layer of deposited waveguide material and, in the interest of minimizing loss as may be due to processing-induced surface roughness, waveguides as patterned preferably undergo a heat treatment which results in surface smoothing and in rounding of the waveguide cross section. Furthermore, in the interest of avoiding re-entrant corners between substrate and waveguide, a wetting layer may be applied to the waveguide prior to heat treatment.

REFERENCES:
patent: 4695123 (1987-09-01), Chang et al.
patent: 4778237 (1988-10-01), Sorin et al.
Journal of the Electrochemical Society, vol. 132 (1985), "Modified Phosphosilicate Glasses for VLSI Applications", K. Nassau et al., pp. 409-415.
Journal of Lightwave Technology, vol. LT--4 (1986), "Ring Resonator Fabricated in Phosphosilicate Glass Films Deposited by Chemical Vapor Deposition", A. Naumaan, pp. 1294-1303.

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