Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2011-06-28
2011-06-28
Martinez, Joseph (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S577000
Reexamination Certificate
active
07969638
ABSTRACT:
A thin black mask is created using a single mask process. A dielectric layer is deposited over a substrate. An absorber layer is deposited over the dielectric layer and a reflector layer is deposited over the absorber layer. The absorber layer and the reflector layer are patterned using a single mask process.
REFERENCES:
patent: 3247392 (1966-04-01), Thelen
patent: 3701586 (1972-10-01), Goetz
patent: 3728030 (1973-04-01), Hawes
patent: 3886310 (1975-05-01), Guldberg
patent: 3955190 (1976-05-01), Teraishi
patent: 4087810 (1978-05-01), Hung et al.
patent: 4403248 (1983-09-01), te Velde
patent: 4421381 (1983-12-01), Ueda et al.
patent: 4441789 (1984-04-01), Pohlack
patent: 4441791 (1984-04-01), Hornbeck
patent: 4498953 (1985-02-01), Cook et al.
patent: 4560435 (1985-12-01), Brown et al.
patent: 4655554 (1987-04-01), Armitage
patent: 4786128 (1988-11-01), Birnbach
patent: 4859060 (1989-08-01), Katagiri et al.
patent: 4925259 (1990-05-01), Emmett
patent: 4954789 (1990-09-01), Sampsell
patent: 4956619 (1990-09-01), Hornbeck
patent: 4973131 (1990-11-01), Carnes
patent: 4982184 (1991-01-01), Kirkwood
patent: 5022745 (1991-06-01), Zahowski et al.
patent: 5028939 (1991-07-01), Hornbeck et al.
patent: 5034351 (1991-07-01), Sun et al.
patent: 5062689 (1991-11-01), Koehler
patent: 5091983 (1992-02-01), Lukosz
patent: 5096279 (1992-03-01), Hornbeck et al.
patent: 5170283 (1992-12-01), O'Brien et al.
patent: 5315370 (1994-05-01), Bulow
patent: 5337191 (1994-08-01), Austin
patent: 5381232 (1995-01-01), Van Wijk
patent: 5422310 (1995-06-01), Ito
patent: 5452138 (1995-09-01), Mignardi et al.
patent: 5457900 (1995-10-01), Roy
patent: 5471341 (1995-11-01), Warde et al.
patent: 5526172 (1996-06-01), Kanack
patent: 5559358 (1996-09-01), Burns et al.
patent: 5561523 (1996-10-01), Blomberg et al.
patent: 5636052 (1997-06-01), Arney et al.
patent: 5638084 (1997-06-01), Kalt
patent: 5646729 (1997-07-01), Koskinen et al.
patent: 5646768 (1997-07-01), Kaeriyama
patent: 5661592 (1997-08-01), Bornstein et al.
patent: 5665997 (1997-09-01), Weaver et al.
patent: 5699181 (1997-12-01), Choi
patent: 5710656 (1998-01-01), Goosen
patent: 5719068 (1998-02-01), Suzawa et al.
patent: 5734177 (1998-03-01), Sakamoto
patent: 5786927 (1998-07-01), Greywall et al.
patent: 5796378 (1998-08-01), Yoshida
patent: 5808781 (1998-09-01), Arney et al.
patent: 5818095 (1998-10-01), Sampsell
patent: 5825528 (1998-10-01), Goosen
patent: 5835256 (1998-11-01), Huibers
patent: 5838484 (1998-11-01), Goosen et al.
patent: 5867301 (1999-02-01), Engle
patent: 5867302 (1999-02-01), Fleming
patent: 5894686 (1999-04-01), Parker et al.
patent: 5914804 (1999-06-01), Goossen
patent: 5920418 (1999-07-01), Shiono et al.
patent: 5959777 (1999-09-01), Whitehead
patent: 5961848 (1999-10-01), Jacquet et al.
patent: 6028689 (2000-02-01), Michalicek et al.
patent: 6040937 (2000-03-01), Miles
patent: 6046659 (2000-04-01), Loo et al.
patent: 6055090 (2000-04-01), Miles
patent: 6100861 (2000-08-01), Cohen et al.
patent: 6123431 (2000-09-01), Teragaki et al.
patent: 6242932 (2001-06-01), Hembree
patent: 6262696 (2001-07-01), Seraphim et al.
patent: 6262697 (2001-07-01), Stephenson
patent: 6282010 (2001-08-01), Sulzbach et al.
patent: 6285424 (2001-09-01), Yoshida
patent: 6327071 (2001-12-01), Kimura
patent: 6335235 (2002-01-01), Bhakta et al.
patent: 6356378 (2002-03-01), Huibers
patent: 6377233 (2002-04-01), Colgan et al.
patent: 6377321 (2002-04-01), Khan et al.
patent: 6384952 (2002-05-01), Clark et al.
patent: 6392618 (2002-05-01), Kimura et al.
patent: 6433917 (2002-08-01), Mei et al.
patent: 6438282 (2002-08-01), Takeda et al.
patent: 6452712 (2002-09-01), Atobe et al.
patent: 6466354 (2002-10-01), Gudeman
patent: 6518944 (2003-02-01), Doane et al.
patent: 6519073 (2003-02-01), Goossen
patent: 6556338 (2003-04-01), Han et al.
patent: 6574033 (2003-06-01), Chui et al.
patent: 6597490 (2003-07-01), Tayebati
patent: 6608268 (2003-08-01), Goldsmith
patent: 6632698 (2003-10-01), Ives
patent: 6650455 (2003-11-01), Miles
patent: 6657386 (2003-12-01), Koshio et al.
patent: 6657832 (2003-12-01), Williams et al.
patent: 6661561 (2003-12-01), Fitzpatrick et al.
patent: 6674562 (2004-01-01), Miles et al.
patent: 6680792 (2004-01-01), Miles
patent: 6698295 (2004-03-01), Sherrer
patent: 6710908 (2004-03-01), Miles et al.
patent: 6715889 (2004-04-01), Nishima et al.
patent: 6753937 (2004-06-01), Grupp
patent: 6778034 (2004-08-01), Nir et al.
patent: 6784956 (2004-08-01), Matsumoto et al.
patent: 6794119 (2004-09-01), Miles
patent: 6813059 (2004-11-01), Hunter et al.
patent: 6841081 (2005-01-01), Chang et al.
patent: 6844959 (2005-01-01), Huibers et al.
patent: 6849471 (2005-02-01), Patel et al.
patent: 6862127 (2005-03-01), Ishii
patent: 6867896 (2005-03-01), Miles
patent: 6870654 (2005-03-01), Lin et al.
patent: 6880959 (2005-04-01), Houston
patent: 6882458 (2005-04-01), Lin et al.
patent: 6882461 (2005-04-01), Tsai et al.
patent: 6885409 (2005-04-01), Stephenson et al.
patent: 6891588 (2005-05-01), Kawachi et al.
patent: 6912022 (2005-06-01), Lin et al.
patent: 6913942 (2005-07-01), Patel et al.
patent: 6940630 (2005-09-01), Xie
patent: 6947200 (2005-09-01), Huibers
patent: 6952303 (2005-10-01), Lin et al.
patent: 6958847 (2005-10-01), Lin
patent: 6960305 (2005-11-01), Doan et al.
patent: 6980350 (2005-12-01), Hung et al.
patent: 6982820 (2006-01-01), Tsai
patent: 7006272 (2006-02-01), Tsai
patent: 7019809 (2006-03-01), Sekiguchi
patent: 7027204 (2006-04-01), Trisnadi et al.
patent: 7034981 (2006-04-01), Makigaki
patent: 7042625 (2006-05-01), Hong et al.
patent: 7046422 (2006-05-01), Kimura et al.
patent: 7061678 (2006-06-01), Chikazawa
patent: 7119945 (2006-10-01), Kothari et al.
patent: 7123216 (2006-10-01), Miles
patent: 7126738 (2006-10-01), Miles
patent: 7130104 (2006-10-01), Cummings
patent: 7135643 (2006-11-01), van Haaster et al.
patent: 7184195 (2007-02-01), Yang
patent: 7184202 (2007-02-01), Miles et al.
patent: 7198973 (2007-04-01), Lin et al.
patent: 7221495 (2007-05-01), Miles et al.
patent: 7236284 (2007-06-01), Miles
patent: 7245285 (2007-07-01), Yeh et al.
patent: 7265809 (2007-09-01), Dunn et al.
patent: 7277143 (2007-10-01), Funahata et al.
patent: 7289259 (2007-10-01), Chui et al.
patent: 7298437 (2007-11-01), Edwards et al.
patent: 7302157 (2007-11-01), Chui
patent: 7310121 (2007-12-01), Hirakata et al.
patent: 7321456 (2008-01-01), Cummings
patent: 7321457 (2008-01-01), Heald
patent: 7324176 (2008-01-01), Dunn et al.
patent: 7327510 (2008-02-01), Cummings et al.
patent: 7372613 (2008-05-01), Chui et al.
patent: 7372619 (2008-05-01), Miles
patent: 7385744 (2008-06-01), Kogut et al.
patent: 7385762 (2008-06-01), Cummings
patent: 7400488 (2008-07-01), Lynch et al.
patent: 7403180 (2008-07-01), Silverstein et al.
patent: 7436573 (2008-10-01), Doan et al.
patent: 7459402 (2008-12-01), Doan et al.
patent: 7535621 (2009-05-01), Chiang
patent: 7566664 (2009-07-01), Yan et al.
patent: 7569488 (2009-08-01), Rafanan
patent: 7612933 (2009-11-01), Djordjev
patent: 7629197 (2009-12-01), Luo et al.
patent: 2001/0003487 (2001-06-01), Miles
patent: 2001/0028503 (2001-10-01), Flanders et al.
patent: 2001/0043171 (2001-11-01), Van Gorkom et al.
patent: 2002/0006684 (2002-01-01), Terao et al.
patent: 2002/0054424 (2002-05-01), Miles
patent: 2002/0067446 (2002-06-01), Wang
patent: 2002/0070931 (2002-06-01), Ishikawa
patent: 2002/0075555 (2002-06-01), Miles
patent: 2002/0114558 (2002-08-01), Nemirovsky
patent: 2002/0126364 (2002-09-01), Miles
patent: 2002/0139981 (2002-10-01), Young
patent: 2002/0146200 (2002-10-01), Kurdle et al.
patent: 2002/0149721 (2002-10-01), Minoura et al.
patent: 2002/0149828 (2002-10-01), Miles
patent: 2002/0149834 (2002-10-01), Mei et al.
patent: 2002/0154422 (2002-10-01), Sniegowski et al.
patent: 2002/0197761 (2002-12-01), Patel et al.
patent: 2003/0016428 (2003-01-01), Kato et al.
patent: 2003/0035196 (2003-02-01), Walker
patent: 2003/0043157 (2003-03-01), Miles
patent: 2003/0053078 (2003-03-01), Missey et al.
patent: 2003/0112507 (2003-06-01), Divelbiss et al.
patent: 2003/0119221 (2003-06-01), Cunningham et al.
patent: 2003/0123125
Luo Qi
Wang Chun-Ming
Xu Gang
Zhong Fan
Greece James R
Knobbe Martens Olson & Bear LLP
Martinez Joseph
QUALCOMM MEMS Technologies Inc.
LandOfFree
Device having thin black mask and method of fabricating the... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Device having thin black mask and method of fabricating the..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Device having thin black mask and method of fabricating the... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2628584