Device having integrated MEMS switches and filters

Details Device having integrated MEMS switches and filters Device having integrated MEMS switches and filters

2008-09-18

2010-11-09

Summons, Barbara (Department: 2817)

Wave transmission lines and networks

Plural channel systems

Having branched circuits

C333S101000, C333S105000, C333S132000, C333S187000, C333S189000

Reexamination Certificate

active

07830227

ABSTRACT:
A method for fabricating integrated MEMS switches and filters includes forming cavities in a silicon substrate, metalizing a first pattern on a quartz substrate to form first switch and filter elements, bonding the quartz substrate to the silicon substrate so that the first switch and filter elements are located within one of the cavities, thinning the quartz substrate, forming conductive vias in the quartz substrate, metalizing a second pattern on a second surface of the quartz substrate to form second switch and filter elements, etching the quartz substrate to separate MEMS switches from filters, forming protrusions on a host substrate, metalizing a third metal pattern on the host substrate to form metal anchors and third switch elements, compression bonding the metal anchors on the host substrate to second switch and filter elements, forming signal lines to integrate the MEMS switches and filters and removing the silicon substrate.

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patent: 6504118 (2003-01-01), Hyman et al.
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patent: 7237315 (2007-07-01), Kubena et al.
patent: 2005/0158905 (2005-07-01), Kubena et al.
patent: 2007/0205839 (2007-09-01), Kubena et al.
patent: 2008/0034575 (2008-02-01), Chang et al.

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