Device having field emission type cold cathode and vacuum tank e

Details Device having field emission type cold cathode and vacuum tank e Device having field emission type cold cathode and vacuum tank e

1998-03-23

2000-09-05

Berman, Jack

Radiant energy

Ionic separation or analysis

With evacuation or sealing means

445 38, 445 42, H01J 938

Patent

active

061146943

ABSTRACT:
The present invention discloses a field emission type cold cathode incorporated device, which comprises a field emission type cold cathode having a number of electron emitting sections, said sections having sharp projections, and a vacuum tank for placing the field emission type cold cathode in a vacuum environment. In this device, a partial pressure of particular noble gas in residual gas contained in the vacuum tank is set equal to or lower than C/I (C is a constant and I is a maximum emission current value per one of the number of electron emitting sections during driving of the field emission type cold cathode). Also, in order to set a partial pressure of the particular noble gas in the residual gas contained in the vacuum tank equal to C/I (C: constant) or lower, a partial pressure of the particular residual gas in the vacuum tank is monitored by a mass analyzer during vacuum tank exhaustion.

REFERENCES:
patent: 3658401 (1972-04-01), Files
F. Sciuccati et al, "A study of the residual gas atmosphere during operational life of 20" 110.degree. CCRTs as a function of bake-out temperature during processing", Vacuum, vol. 38, No. 8-10, pp. 847-851, 1988.
C. A. Spindt et al, "Physical properties of thin-film filed emission cathodes with molybdenum cones", Journal of Applied Physics, vol. 47, No. 12, Dec. 1976, pp. 5248-5263.

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