Device having an exchangeable substrate sleeve for measuring lay

Details Device having an exchangeable substrate sleeve for measuring lay Device having an exchangeable substrate sleeve for measuring lay

1990-06-28

1991-09-10

Turner, Samuel

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356355, G01B 902

Patent

active

050468499

ABSTRACT:
A device for the continuous measurement of the thickness of layers which are deposited on a substrate at low pressure, comprising a light source and two light conductors. Both light conductors are present in a pipe closed at one end by an optical window. Said end has an exchangeable sleeve which at one end comprises an optical window and which can be slid so as to fit the pipe in which the light conductors are present.

REFERENCES:
patent: 4753530 (1988-06-01), Knight et al.
"Applications of Light Guides in Process Control", Phillips Tech. Review, Severin et al., 1-1987, pp. 58-60.

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