Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2002-07-02
2004-05-25
Ben, Loha (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S247000, C359S254000, C359S291000, C359S587000, C385S014000, C430S005000, C430S322000, C430S323000, C216S012000
Reexamination Certificate
active
06741377
ABSTRACT:
FIELD OF THE INVENTION
This invention relates to optical devices. In particular it relates to microoptical electromechanical devices and to a method for fabricating same.
BACKGROUND
Today, a wide variety of optical devices such as Microelectromechanical Systems (MEMS) devices may be fabricated using micromachining and microelectronic fabrication techniques.
For example in some cases, MEMS devices may include optical components and are more specifically referred to as micro-optoelectromechanical systems or “MOEMS” devices. One example of such a MOEMS device is the Interferometric Modulator (IMOD) device described in U.S. Pat. No. 5,835,255. The IMOD devices of U.S. Pat. No. 5,835,255 may be fabricated in an array and used in a reflective display wherein each IMOD functions as a pixel to provide a desired optical response.
In order to improve the desired optical response, the contribution of reflected ambient light from certain inactive areas of the IMODS should be reduced. Thus, these inactive areas of the IMODS should be made to be light-absorbing, typifying a need to mask-off or make light-absorbing inactive areas in optical devices in general.
SUMMARY OF THE INVENTION
According to one aspect of the invention there is provided a method for fabricating a device comprising at least one optical component formed on a transparent substrate, the method comprising determining an area of the substrate that is to be light absorbing; and fabricating a light-absorbing mask on the determined area prior to fabricating at least one optical component.
According to a second aspect of the invention, there is provided a device comprising a substrate; and first and second optical components formed on the substrate, wherein the first optical component has two modes, each producing a different optical response to light incident thereupon, and wherein the second optical component absorbs the light and is formed on the substrate before the first optical component is formed.
According to a third aspect of the invention there is provided a method for fabricating a device, the method comprising forming a static optical component on a substrate, wherein the static optical component absorbs light; and forming a dynamic optical component adjacent to the static optical component, wherein the dynamic optical component comprises a driven and an undriven state each having a characteristic optical response to incident light.
According to a further aspect of the invention there is provided a device comprising a substrate; a static optical component on the substrate, wherein the static optical component absorbs the light; and a dynamic optical component adjacent to the static optical component, wherein the dynamic optical component comprises a driven and an undriven state each having a characteristic optical response to incident light.
REFERENCES:
patent: 4287449 (1981-09-01), Takeda et al.
patent: 5164858 (1992-11-01), Aguilera, Jr. et al.
patent: 5326426 (1994-07-01), Tam et al.
patent: 5474865 (1995-12-01), Vasudev
patent: 5835255 (1998-11-01), Miles
patent: 6288824 (2001-09-01), Kastalsky
patent: 6342970 (2002-01-01), Sperger et al.
patent: 6466354 (2002-10-01), Gudeman
Ben Loha
Blakely , Sokoloff, Taylor & Zafman LLP
Iridigm Display Corporation
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