Supports – With condition responsive control means
Patent
1997-07-18
2000-03-28
Berger, Derek J.
Supports
With condition responsive control means
188378, 248638, F16M 1300
Patent
active
060420790
ABSTRACT:
A device for the vibration isolation with level control of an object with respect to a base, having a pneumatic spring and a completely mechanically decoupled control loop comprising a position sensor which operates in a contact-free manner, an electronic controller and an electrically controllable flow valve allowing a contact-free level control with adjustable control parameters.
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Berger Derek J.
Le Tan
Mikroskopie Und Systeme GmbH
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