Measuring and testing – Surface and cutting edge testing – Roughness
Patent
1997-08-12
1999-12-28
Noland, Thomas P.
Measuring and testing
Surface and cutting edge testing
Roughness
310357, 310359, G01B 734
Patent
active
060065958
ABSTRACT:
There is disclosed a device for applying vibrations to a cantilever used in an atomic force microscope. The cantilever has a base portion, and a probe is attached to the front end of the cantilever. The device has a piezoelectric plate subassembly consisting of first and second piezoelectric plates having junction faces cemented together. A piezoelectric plate subassembly support portion supports a part of the second piezoelectric plate. A voltage is applied to the piezoelectric plates so that one of them is stretched vertical to the junction faces and that the other is contracted vertical to the junction faces.
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Jeol Ltd.
Noland Thomas P.
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