Cleaning and liquid contact with solids – Apparatus – With means to movably mount or movably support the work or...
Patent
1996-12-11
1998-12-08
Coe, Philip R.
Cleaning and liquid contact with solids
Apparatus
With means to movably mount or movably support the work or...
118 52, 118503, 134902, B08B 302
Patent
active
058456627
DESCRIPTION:
BRIEF SUMMARY
BACKGROUND OF THE INVENTION
The invention relates to a device for treatment of wafer-shaped articles, especially silicon wafers, with a treatment fluid with a rotary mounting located in a chamber for the wafer-shaped article and with at least one nozzle for applying the treatment fluid to the wafer-shaped article.
DESCRIPTION OF THE RELATED ART
For holding of wafer-shaped articles, especially silicon wafers, devices have become known in the most varied versions.
In addition to carriers for silicon wafers which operate according to the Bernoulli principle (see for example EP 0 316 296 A and EP 0 444 714 A) , from DE 42 32 902 A1 a mount for transport of flat, round wafer-shaped substrates has become known which has elastic retaining fingers which are located in the plane of tension members of transport tongs. The device known from DE 42 32 902 A1 however is used solely for transportation of round wafer-shaped articles in a vacuum process unit.
A carrier for semiconductor wafers with retaining parts which engage the outer periphery of silicon wafers is known from U.S. Pat. No. 5,168,886 A. Using this carrier the semiconductor wafers can also be caused to rotate. In any case, in the carrier known from U.S. Pat. No. 5,168,886 A only one side of the semiconductor wafer is ever accessible to a treatment process.
SUMMARY OF THE INVENTION
The object of the invention is to devise a device of the initially mentioned type with which the two sides of the wafer-shaped article are accessible to a treatment process.
According to the invention this object is achieved by the mounting for the wafer-shaped article having a ring which is pivotally mounted in the device around an axis and by there being several retaining fingers on the ring which adjoin the outer periphery of the wafer-shaped article, the ends of the retaining fingers which adjoin the outer periphery of the wafer-shaped article being located at a distance from the plane of the ring.
In the device according to the invention not only are the two sides of the wafer-shaped article (silicon wafer) accessible to a treatment process, but it is also advantageous that the wafer-shaped article is located at an axial distance from the pivotally mounted and rotary-driven ring because the treatment fluid flung off the wafer-shaped article does not come into contact with the rotary ring and its bearing so that they are not adversely affected by the treatment fluid, for example, corroded.
Advantageous and preferred embodiments of the device according to the invention comprise the subject matter of the subclaims.
BRIEF DESCRIPTION OF THE DRAWINGS
Other details and features as well as the advantages of the device according to the invention follow from the following description of embodiments of the invention in which reference is made to the attached drawings, in which exemplary embodiments are shown as much as possible in schematic form.
FIG. 1 shows in schematic form and in axial cross section a first embodiment of a device for treating wafer-shaped articles,
FIG. 2 shows in schematic form and in cross section a second embodiment of the device for treating wafer-shaped articles,
FIG. 3 shows one embodiment of the retaining fingers on an enlarged scale,
FIG. 4 shows one embodiment with swivelling retaining finger,
FIG. 5 shows one embodiment with rotary retaining finger,
FIG. 5a shows the embodiment of FIG. 5 in an overhead view,
FIG. 6 shows an embodiment with retaining fingers with mechanical interlock, and
FIG. 7 shows another embodiment of a retaining finger with mechanical interlock.
DESCRIPTION OF THE PREFERRED EMBODIMENTS
In chamber 1 ring 3 is pivotally mounted in bearing 2. Ring 3 can be caused to rotate at high speed by a drive which is symbolized by drive roller 3' which engages ring 3. Chamber 1 can be made closed, as is shown by way of example in FIG. 1, in which a closing element, for example flap 16', can be assigned to one suction channel 16 or each suction channel 16, if suction channels 16 are provided.
On the inside edge of ring 3 are several (
REFERENCES:
patent: 4788994 (1988-12-01), Shinbara
patent: 4903717 (1990-02-01), Sumnitsch
patent: 5168886 (1992-12-01), Thompson et al.
IBM Technical Disclosure Bulletin, vol. 18, No. 8 "Spin Basket", Censak et al., pp. 2476-7 Jan. 1976.
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